Get Focused Ion Beam Systems: Basics and Applications PDF

By Nan Yao

ISBN-10: 0521831997

ISBN-13: 9780521831994

The concentrated ion beam (FIB) procedure is a vital instrument for knowing and manipulating the constitution of fabrics on the nanoscale. Combining the program with an electron beam creates a DualBeam - a unmarried method that could functionality as an imaging, analytical and pattern amendment instrument. proposing the foundations, features, demanding situations and functions of the FIB method, this edited quantity comprehensively covers the ion beam expertise together with the DualBeam. the elemental ideas of ion beam and two-beam platforms, their interplay with fabrics, etching and deposition are all coated, in addition to in situ fabrics characterization, pattern coaching, three-d reconstruction and purposes in biomaterials and nanotechnology. With nanostructured fabrics turning into more and more vital in micromechanical, digital and magnetic units, this self-contained evaluate of the variety of ion beam equipment, their merits, and whilst most sensible to enforce them is a useful source for researchers in fabrics technology, electric engineering and nanotechnology.

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Example text

The two-beam system also improves the deposition of metal or insulating layers. In the case of insulating layers, ion beams often leave the layer with poor insulating properties due to the incorporation of gallium ions in the deposition; however, in the two-beam system, the SEM beam can be used to induce deposition, ensuring a high insulating quality. One such case is that of SiOx, where the resistance of the layer is two orders of magnitude higher than when an ion beam is used for the deposition [22].

7 Schematic of a three-electrode electrostatic lens in an ion beam column. Field lines generated by the voltages on the electrodes are shown as dotted lines, and the ion trajectories traveling from left to right are in gray. passing the second field, the beam is once again constricted, but this time the ions are decelerated by the increasingly positive field to near their original velocity [14]. Just as in the magnetic lens, the charged particle beam exits and continues to narrow toward its focal point downstream in the column.

2 shows that the chemical bond of element implanted into silica glass changes depending on its concentration. 1 Schematic view graphs of nanocluster/nanocrystal formation. 2 Chemical bonds of the element implanted in silica glass as a function of its concentration. (Reprinted with permission from Nucl. Instr. Meth. B, 166–167 (2000), 831–9. 3 Sequence of snapshots from KLMC simulations. (a) The X-type ‘‘core’’ NC. The microstructure of the compound NC after the deposition of NY ¼ 2NX impurities is shown for (b) no mixing, (c) low intensity mixing, and (d) high intensity mixing.

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Focused Ion Beam Systems: Basics and Applications by Nan Yao

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